In electrodeposited cobalt film, the fcc cobalt phase, which is ordinarily recognized as a high temperature phase located over the 690 K region in the phase diagram, emerges at room temperature (1-7). Electrodeposited chromium films often assume hcp and/or fcc structure instead of ordinary bcc with an increasing the total amount of absorbed hydrogen (8-14). The structural changes in electrodeposited cobalt films are generally assumed to be influenced by absorbed hydrogen. However detecting the total amount of absorbed hydrogen in electrodeposited cobalt films was too difficult because the amount was much lower than the total amount of absorbed hydrogen in the electrodeposited chromium films (15-16). In this study, we established a quantitative analysis method of absorbed hydrogen in electrodeposited cobalt films by thermal desorption spectroscopy (TDS). This study elucidates the relationship between the total amount of absorbed hydrogen and the microstructure of the electrodeposited cobalt films.
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