Thickness effect of sputtered ZnO seed layer on the fabrication of ZnO nanorods on flexible polyimide films and their ethanol gas sensing properties

摘要

Controlled ZnO nanostructures were grown on a flexible substrate for the future development of smart sensing tags. Thermolysis-assisted chemical solution deposition was used to grow ZnO nanorods at 85°C from O.Olmol of Zinc nitrate hexahydrate and HMT (Hexamethyltetramine) solution. To promote and modulate the ZnO nanorods, R.F. sputtered ZnO seed layers were deposited on polyimide substrates at various film thicknesses in the range of 8 to 160 nm. The optimum processing conditions to fabricate ZnO nanostructures have been investigated to examine the growth behaviors and to correlate the process parameters with the morphological characteristics. When the ethanol gas sensitivities were measured at different thickness of ZnO seed layers before growing ZnO nanorods, the highest sensitivity was obtained at 40 nm thick ZnO film at 300°C where the film thickness is similar to the Debye length. When ZnO nanorods were grown on such a ZnO seed layer, the sensitivities were more heavily influenced by the ZnO nanostructures rather than the thickness of the seed layer probably due to the dominant proportion of carrier density involved with the gas absorption.