Monolithic Chip-to-chip WDM Optical Proximity Coupler Utilizing Echelle Grating Multiplexer/Demultiplexer Integrated with Micro Mirrors Built on SOI Platform

摘要

We report the first monolithically integrated chip-to-chip WDM optical proximity coupler with 4-channel × 200GHz-spacing multiplexer/demultiplexer (MUX/DEMUX) functionality utilizing an echelle grating, micro reflective minors, and waveguide mode transformers on single silicon-on-insulator (SOI) substrate.