A STUDY ON RESPONSE PROPERTIES OF SURFACE TEXTURE MEASURING INSTRUMENTS IN TERMS OF SURFACE WAVELENGTH

摘要

It is important to control the surface quality and texture of manufactured parts for advanced industrial products. While many types of surface texture measuring instruments appear on the market, optical instruments are increasingly being adopted because they perform non-contact measurements and can easily measure a surface area instead of a simple line profile. Measurements by optical instruments are based on different principles and do not always correlate to each other. The uncertainly in correlation raises some concerns by the users regarding the reliability of the measurement. This study aims to explain the reliability of surface measurements performed by optical instruments. To begin with, we took measurements of test samples using a different instruments based on differing technologies. Next, we examined what caused differences between the measurements. Lastly we studied how we could improve the correlation of the measuring results among these measuring instruments.