Development of high precision Coordinate Measuring Machine (CMM) (1st report, Evaluation method of XY stage)

摘要

To develop a high precision Coordinate Measuring Machine (CMM), it is important to evaluate the XY stage on the CMM. In this paper, multi-laser interferometers are mounted in a stationary sensor stage, and a standard bar mirror is fixed on the moving table. A multi-probe measurement method is developed to analyze the motion error of horizontal straightness and the yaw error simultaneously.