Flexible EUV and XUV Spectrophotometer for reflection, transmission and absorption metrology - (PPT)

摘要

Various tasks in developing and maintaining EUVL processes require accurate information on spectral properties of involved components. Besides very specialized tools tailored to ultimate accuracies for specialized tasks (e.g.. geometries etc ) like e.g. our mask reflectometer EUV-MBR, R&D, application labs and fab metrology require highly flexible metrology tools to solve broad spectrum of tasks - some of them unknown, yet, only potentially arising in the future. We have realized an EUV Spectrophotometer adapted for the analysis of samples in the EUV, XUV and VUV spectral range.