Semiconductor industry experiencing a period of accelerated growth in number of units and in the amount of silicon area shipped; This accelerated growth is driven by new exciting devices and applications and by new users; Equivalent scaling has replaced classical scaling; Lithography remains a fundamental enabler of miniaturization; EUV is finally approaching pre-manufacturing after 15 years incubation; Many challenges still lay ahead but EUVL technology has the potential of lasting to the final limits of GMOS and beyond.
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