Resist outgassing evaluation by gas chromatography mass spectrometry (GC-MS), quadrupole mass spectrometry (QMS) and pressure-rise - (PPT)

机译：通过气相色谱质谱（GC-MS），四极谱质谱（QMS）和压力升高 - （PPT）抵抗抗抵抗偏移评价 - （PPT）

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摘要

Resist outgassing evaluation method. Resist out-gassing analysis. Evaluation tools & Calibrations. Pressure rise. GC-MS. QMS.

机译：抵抗偏移评价方法。抵抗出抗气性分析。评估工具和校准。压力升高。 GC-MS。 QM。

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《International Symposium on Extreme Ultraviolet Lithography》|2010年||共13页
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Hiroaki Oizumi; Kazuyuki Matsumaro; Julius Joseph Santillan; Toshiro Itani;
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中图分类 TN305.7-53;
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Resist outgassing evaluation by gas chromatography mass spectrometry (GC-MS), quadrupole mass spectrometry (QMS) and pressure-rise - (PPT)

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