Imaging soft X-ray spectrometers based on superconducting tunneljunctions

摘要

X-ray detectors based on superconducting tunnel junctions (STJs) have demonstrated good energy resolution in the soft X-ray energy range 0.1-6 keV. In particular DROIDS (Distributed Read Out Imaging Devices), consisting of a superconducting absorber strip with superconducting tunnel junctions as read-out devices on either end, could combine this high resolving power with a large sensitive area and good soft X-ray detection efficiency. In this paper we present results on the spectroscopic performance of Al and Ta/Al DROIDs with different absorber materials (Ta, Re) and with variations in absorber configurations: our standard absorber integrated with the read-out structure is compared with absorbers deposited after definition of the read-out structure. The latter allows maximising the detection efficiency through thicker layers and different absorber materials. Also, absorbers which are electrically coupled to the readout structure are compared to insulated absorbers which couple to the readout structure by phonon exchange across a thin dielectric layer. New process routes have been designed for all new configurations. Whilst not all these structures have been fabricated successfully yet, our integrated absorber sofar exhibits the best performance, with 2.45 eV FWHM at 400 eV and 16.6 eV FWHM at 5.9 keV.