X-ray fluorescence spectrometer for measuring intensities of secondary X-ray emitted from sample, calculates theoretical intensities of secondary X-rays, based on which thickness or concentration precision of each layer is calculated

摘要

An evaluating unit (23) calculates the theoretical intensities of secondary X-rays emitted from a thin-film sample (3) having layers of specific thickness and compositions, based on which the precision of thickness or the concentration of each layer is calculated. The applicability or inapplicability of the X-ray fluorescence analysis is determined using selected secondary X-ray lines to be measured, and is displayed.