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Recent improvements of high density magnetic deformable mirrors: faster, larger and stronger.

机译:最近的高密度磁性可变形镜的改进:更快,更大更强。

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The performances of high resolution magnetic deformable mirrors have been recently improved: the mechanical bandwidth has been increased to 2 kHz, and a fast stroboscopic Shack-Harman wavefront was used to measure a settling time as low as 400μs. Recent improvements in the substrate-thinning processes made possible the availability of large, high-quality membranes compatible with deformable mirrors. Prototype testing and simulations show that devices with up to 60x60 actuators are now possible. For open-loop operations, a novel feed-forward algorithm was developed to compensate for residual creeping and improve the DM stability to below10nm RMS over 6 hours.
机译:最近已经改善了高分辨率磁性可变形镜的性能:机械带宽已增加到2 kHz,并且使用快速频道棚腿波前波前测量低至400μs的稳定时间。基材稀释过程的最近改进使得具有与可变形镜兼容的大型高质量膜的可用性成为可能。原型测试和仿真表明,现在可以实现最多60x60执行器的设备。对于开环操作,开发了一种新的前馈算法,以补偿残留蠕变,并在6小时内将DM稳定性提高到10nm rms以下。

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