Study on the Control System of an Automatic Testing Equipment for Diffusion Vacuum Pumps by Fault Tree Analysis

摘要

In order to promote the performance measurement technique of the diffusion vacuum pumps, one full-automatic test equipment was newly developed and patented. The control system is the core of the test equipment and its reliability analysis is necessary. The structure and the characteristics of the test equipment are introduced in paper. The fault tree of the test equipment is set up and illustrated in detail. Based on fault tree analysis, the reliability designs of the hardware and software of the test equipment are carried out.