Sensor systems usually consist of components of several domains. The sensor structure itself covers at least two domains: analog electrical and nonelectrical behavior. The corresponding circuits may be digital or analog electrical parts, mostly also including software. The specification of such heterogeneous systems is complex and needs special constructs to formalize the requirements to this system. Commonly system design starts with a non-formal specification document in loosely-formatted textual form. There is no chance to check this non-formal information for consistency and completeness beside a human-powered time-consuming review process. This problem could be solved by the formalization of the specification data. This paper presents a tool for the specification of heterogeneous systems like MEMS. It saves the formalized specification information in a database and allows the export of data to modelcheckers for completeness and reachability check as well as the export to simulation tools like SystemC-AMS and therewith a connection to the MEMS design flow proposed in.
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