Widely-Accessible Distributed MEMS Processing Environment. The MEMS Exchange Program.

摘要

Corporation for National Research Initiatives (CNRI) is submitting this Final Report for work performed on an award from the Defense Advanced Research Projects Agency (DARPA) under Grant Number MDA972-03-1-0022. This Grant award supported the program entitled, 'A Widely-Accessible Distributed MEMS Processing Environment,' also known as the MEMS Exchange program, whereby CNRI established, operated, and advanced a distributed MEMS processing environment in which fabrication and testing of MEMS devices and systems is performed at multiple, geographically dispersed sites located around the country.