The microBUILDER technology platform: building a microfluidic flow sensor

摘要

microBUILDER is a consortium of nine European companies, research institutes, and academic institutions aiming at stimulating the use of microfluidics and mixed technology systems [1]. microBUILDER has developed a technology platform, i.e. a set of validated and standardized methods, tools, competences and fabrication technologies with coordinated interfaces to lower design cost and shorten the time from prototype to volume manufacturing. The platform is based on qualified silicon / glass micromachining and polymer injection moulding fabrication technologies which are suitable for prototyping and series production. This concept provides the advantage that even in early phases of product development, mass fabrication technologies can be used. In addition to these fabrication technologies a number of complementary technologies and methods are developed. This mixed technology tool box enables time and cost efficient development of microfluidic components and systems like labs-on-chips, dosing systems, fluidic sensors, etc. For many applications microfluidic components need to be disposable and thus are often manufactured in polymer technologies allowing low-cost solutions. However, for applications where precise dosing of fluids is required (e.g. for quantitative lab-on-a-chip assays or medical dosing systems), the integration of silicon sensor chips or actuators can be beneficial to achieve enhanced functionality. For such applications the microBUILDER consortium has developed a standard for integrating silicon chips in polymer slides. Silicon sensors manufactured by the Infineon SensoNor Multi- Project-Wafer process MultiMEMS [2] are integrated with injection moulded chips from the company thinXXS. The standard that enables quick plug-and-play testing of new fluidic systems includes design rules for the silicon/glass sensor chips to be integrated with standard polymer slides and the respective polymer slides which are available off-the-shelf. For the readout of differential signal sensors, an electronics module compatible with the polymer sensor slide is also available off-the-shelf. The polymer slides fit into the microfluidic construction kit [3] where up to four modules can be fluidically connected and tested (Figure 1). Furthermore, design rules which allow customers to design there own polymer slide are also available. All design rules and standards are documented in the microBUILDER master design handbook.