Goal of this work is to find the minimal required sensor area of a MEMS accelerometer with consideration of given specifications. For a realistic and therewith complex sensor model this is only possible with numerical optimization, which has typically the difficulty of finding the global minimum. To achieve this we used standard available optimization algorithms and complemented them by additional algorithms implementing some techniques to find the minimal possible sensor layout. A miniaturized sensor's chip size reduces manufacturing costs and leads to more competitive package sizes. This is especially important for consumer applications like mobile phones and navigation devices, where an increasing demand of accelerometers is expected in the near future. With increasing miniaturization of a sensor it is increasingly important to find the optimal design in order to use chip area as efficiently as possible.
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