Nano-aquarium with microfluidic structures fabricated byfemtosecond laser direct writing for dynamic microorganism analysis

摘要

We demonstrate the fabrication of three-dimensional (3D) hollow microstructures embedded in photostructurable glassby a nonlinear multiphoton absorption process using a femtosecond (fs) laser. Fs laser direct writing followed byannealing and successive wet etching in dilute hydrofluoric (HF) acid solution resulted in the rapid manufacturing ofmicrochips with 3-D hollow microstructures for the dynamic observation of living microorganisms in fresh water. Theembedded microchannel structure enables us to analyze the continuous motion of Euglena gracilis and Cryptomonas.Such microchips, referred to as nano-aquariums realize the efficient and highly functional observation ofmicroorganisms.