Dynamic analysis of piezoelectric-solid-liquid coupledsystem of micro nebulizer

摘要

Piezoelectric micro nebulizer is a typical piezoelectric-solid-liquid coupling problem. A 2D FEM model was presentedfor this system. Numerical results show that when the piezoelectric actuator is vibrated, nozzle film also is generatedvibration, and the phase relationship occurs to them, and the operation at the second resonance frequency is moredesirable than others. A good agreement between experimental results and theoretical results confirmed the validity ofthe theoretical model we developed. Therefore, the design of micro nebulizer to consider only the amplitude ofpiezoelectric vibration is not comprehensive, we must also consider the nozzle film vibration, as well as the phasebetween the back film and the nozzle film, and this can provide guidance for the optimal design of micro nebulizer.