In order to open a way to realize ultra high density hard disk (HD) drives with fast operation speed utilizing a spin nano-technology, precisely controlled fabrication technology with nano-scale for head and media according to the required properties is essential from material, processes, and physical view point. In the present paper, correlation between process parameter of ultra clean (UC) dry-process proposed by us and structure and physical property for ferro/antiferro interface, magnetic tunnel junctions and perpendicular magnetic recording media will be widely discussed.
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