Effect of ICP etching on InP-based multiple quantum wells microring lasers

摘要

Dry etching of InP-based epitaxial structure was performed by using inductively coupled plasma (ICP) system with different chemistries. The surface topographies shown that the waveguide profiles etched using the Cl2/CH4/Ar recipe have better surface and sidewall quality than that of the Cl2/BCl3 chemistry. To verify the practical influence of ICP etching, InP/AlGaInAs multiple quantum wells microring lasers were fabricated, and the electrical and optical properties were compared. The experimental results revealed that the Cl2/CH4/Ar recipe is preferable to the fabrication of InP-based optoelectronic devices in our experimental system.