Verilog-A modeling and design of a micromachined capacitive accelerometer

摘要

In order to design accelerometers, electromechanical hybrid simulation with the sensor and interface circuit together is required. In this paper a Verilog-A model for the accelerometer sensor is presented, and based on the Verilog-A model presented, an open-loop capacitive accelerometer with a full-scale range of ±2g is presented. The Verilog-A model, characterizing the properties of the sensor, is compared to be right with the Matlab model published before. The accelerometer is tested to achieve the equivalent noise acceleration (ENA) about 7.7µg/√Hz.