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Large-area (>1 cm~2) Die-attach by Low-temperature Sintering of Nanoscale Silver Paste

机译:通过纳米级银膏的低温烧结,大面积(> 1cm〜2)模具

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A low-temperature sintering technique enabled by a nanoscale silver paste has been developed for attaching large-area (> 1 cm~2) semiconductor devices. Recently, we showed that a nanoscale silver paste could be used to bond small devices at temperatures similar to solder-reflow temperatures with-out any externally applied pressure. In this study, we extended the use of the nanomaterial to attach large-area devices by introducing a low pressure up to 5 MPa. The effects of pressure on bonding strength and sintered microstructure have been investigated. Scanning electron microscopy showed that the attachment layer had a uniform microstructure with micron-sized porosity with the potential for high reliability under high temperature applications.
机译:已经开发出由纳米级银膏实现的低温烧结技术,用于连接大面积(> 1cm〜2)半导体器件。最近,我们表明,纳米级银浆可用于在类似于任何外部施加压力的焊料回流温度类似的温度下粘合小器件。在这项研究中,我们延长了纳米材料的使用,通过引入高达5MPa的低压来连接大面积器件。研究了对粘合强度和烧结微观结构的压力的影响。扫描电子显微镜表明,附接层具有均匀的微观结构,具有微米尺寸的孔隙率,具有高温应用的高可靠性。

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