Control performance assessment (CPA) is an important tool to ensure high performance of control systems in manufacturing plants. In recent years, CPA has attracted considerable attention in the semiconductor industry. There is an urgent need for efficient on-line CPA tools driven by frequent performance changes and limited number of control engineers. Current CPA in the semiconductor industry uses, as the benchmark for control performance is the process capability, which is obtained by comparing the post-process metrology measurements with product specification limits. In this work, we present a new CPA tool to assess both threaded and non-threaded EWMA controllers in semiconductor manufacturing.
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