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UNCERTAINTY EVALUATION OF MODULUS AND HARDNESS FOR THE NANOINDENTATION MEASUREMENT SYSTEM

机译:纳米狭窄测量系统模量和硬度的不确定性评价

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摘要

The uncertainties of nanoindentation measurement system were evaluated in this paper. A precise electonic balance and an optical interferometric system were respectively utilized to calibrate the force and displacement of nanoindentation measurement system. The uncertainties of reduced modulus and indentation hardness providing from the naoindentaion measurement were respectively obtained.
机译:本文评估了纳米凸缘测量系统的不确定性。分别利用精确的选择性平衡和光学干涉系统来校准纳米压腔测量系统的力和位移。分别获得了从Naoindentaion测量的减少的模量和压痕硬度的不确定性。

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