Study on the Trap Distribution in Polyimide Thin Film Based on TSDC Method

摘要

Electron traps in polyimide (PI) film were investigated by analyses of thermally stimulated depolarization current (TSDC). A broad a peak of TDSC was observed around 459K in PI which was ascribed to the release of space charge. Then we estimated electron trap levels in polyimide based on the theory of Simmons and found their distributed by Gaussian distribution in the range of 0.45～0.90eV. And compare the trap distributions of PI-SiO{sub}2 and PI-Al{sub}2O{sub}3 nano-composite films, give a picture of nano-particle effected on the properties of polymeric dielectric.