Toward Structure Preserving Model Reduction for Analysis and Simulation in Micro-technology

摘要

A new method for conversion of the state-space reduced model into a second order representation is proposed. It is an important step to recover the second order structure of the system in model reduction, in particular when we are dealing with mechanical systems with second order structure which frequently happen in micro-technology The conversion method is straightforward and easily applicable for both SISO and MIMO systems. The method can be applied to the reduced order systems for the second order model reduction. The proposed method is better than previous works in this context because it does not impose any constrain for implementation and each system in the state-space form can be an input for the proposed conversion method.