Simulation and Experimental Study of a 13.56 MHz Planar Coil, Inductively Coupled Plasma Reactor

摘要

Hysteresis in a 13.56 MHz planar coil, inductively coupled plasma (ICP) reactor is modeled using the methods prescribed in El-Fayoumi et al. [2] and Turner et al. [3]. The stable working points of the reactor are identified by determining the intersections between simulated absorbed electron power and electron loss power curves. From the plots, transition currents between stable working points are identified and compared with experimentally measured values. Study of hysteresis in ICPs provides better understanding of ICP formation which would be useful for reactor pressure and current optimization.