Synthesis, Characterization and Growth Mechanism of ZnO Nano-flower by Thermal Chemical Vapor Deposition Method at Low Deposition Temperature

摘要

Photoluminescence and morphology studies of Zinc Oxide (ZnO) thin films prepared by using Thermal Chemical Vapor Deposition (Thermal-CVD) were investigated. The ZnO compound was synthesized from zinc acetate dehydrate which act as a starting material to form the ZnO thin films. It was deposited on silicon with low deposition temperature ranging from 400 - 600°C with Au as a catalyst assisted. Surface morphology of the samples was examined by Scanning Electron Microscope and photoluminescence properties were studied using Photoluminescence Spectrometer The surface morphologies of the ZnO nano-flower structure was obviously obtained at deposition temperature of 400"C. The individual nano-rods diameter of nano-flower is about 100-350 nm, but the end of nano-rods are very sharp which is the size is less than 50 nm. Possible growth mechanism of ZnO nano-flower also discussed. Room temperature PL spectra from the ZnO nano-flower revealed a strong UV emission and broad green emission This result is very useful for sensor, probe tip and light emitter applications.