Sol-Gel Template Synthesis of the Oriented Mesoporous Thin Oxide Films and Nanostructures

摘要

In this communication, a different approach to the preparation of mesoporous SiO2 and TiO2 thin films and nanocomposites has been adopted, aimed at preparation of oriented mesoporous thin films with highly stable roughness of the film surface and controlled pore dimension. We describe the preparation and compositional analysis of thin film coatings prepared using sol-gel techniques (thickness 50–500 nm, roughness ± 0.5 nm with pore distribution 2.4–8 nm for silica oxide and up to 300 nm for titanium oxide and porosity 30–50%). Analyses of these systems were based on XRD, AFM, FTIR, and elipsometry porosimetry data. The structural evolution of the film during thermal treatment was observed by FTIR spectroscopy and XRD.