Simulation, fabrication and dynamics characteristicsof electrostatically actuated switches

机译：静电驱动开关的仿真，制造和动力学特性

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MEMS resonators were studied experimentally and with FEM modeling. Response time was found to be 1-5 usec, pull-in voltage 7-30 volt.

机译：实验研究了MEMS谐振器，并进行了有限元模拟。响应时间被发现为1-5 USEC，拉出电压7-30伏。

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《SPIE Conference on Micro- and Nanoelectronics》|2008年||共8页
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A.V. Postnikov; Amirov; V.V. Naumov; V.A. Kalnov;
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中图分类全集、选集;
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resonators; voltage; fabrication;

机译：谐振器;电压;制造;

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专利

1. A NEW EFFICIENT APPROACH FOR MODELINGAND SIMULATION OF NANO-SWITCHES UNDER THECOMBINED EFFECTS OF INTERMOLECULAR SURFACEFORCES AND ELECTROSTATIC ACTUATION [J] . MAHDI MOJAHEDI, HAMID MOEENFARD, MOHAMMAD TAGHI AHMADIAN International journal of applied mechanics . 2009,第2期

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2. NONLINEAR ACTUATION MODEL FOR LATERAL ELECTROSTATICALLY-ACTUATED DC-CONTACT RF MEMS SERIES SWITCHES [J] . A. Lazaro, D. Girbau, L. Pradell, Microwave and optical technology letters . 2007,第6期

机译：横向静电驱动直流接触RF MEMS系列开关的非线性激励模型
3. Fabrication and dynamic analysis of the electrostatically actuated MEMS variable capacitor [J] . Dong-Ming Fang, Xiang-Meng Jing, Pei-Hong Wang, Microsystem Technologies . 2008,第3期

机译：静电驱动MEMS可变电容器的制作和动态分析
4. Simulation, fabrication and dynamics characteristicsof electrostatically actuated switches [C] . A.V. Postnikov, Amirov, V.V. Naumov, SPIE Conference on Micro- and Nanoelectronics . 2008

机译：静电驱动开关的仿真，制造和动力学特性
5. Viscoelastic modeling and simulation of electrostatically actuated RF MEMS switches. [D] . Evren, Alp. 2010

机译：静电驱动RF MEMS开关的粘弹性建模和仿真。
6. Toward the correction of effective electrostatic forces in explicit-solvent molecular dynamics simulations: restraints on solvent-generated electrostatic potential and solvent polarization [O] . Maria M. Reif, Chris Oostenbrink -1

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7. Comprehensive Reduced-Order Models Of Electrostatically Actuated MEMS Switches And Their Dynamics Including Impact And Bounce [O] . Snow, Michael G., Bajaj, Anil K. 2010

机译：静电驱动MEMS开关的综合降阶模型及其动力学（包括冲击和弹跳）

Simulation, fabrication and dynamics characteristicsof electrostatically actuated switches

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