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Characterization of Barium Strontium Titanate Thin Films on Sapphire Substrate Prepared via RF Magnetron Sputtering System

机译:通过RF磁控溅射系统制备的蓝宝石衬底上钛酸钡薄膜的表征

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Barium Strontium Titanate (BaosSro_5TiO_3) is known to have a high dielectric constant and low loss at microwave frequencies. These unique features are useful for many electronic applications. This paper focuses on material characterization of BST thin films deposited on sapphire substrate by RF magnetron sputtering system. The sample was then annealed at 900 °C for two hours. Several methods were used to characterize the structural properties of the material such as X-ray diffraction (XRD) and atomic force microscopy (AFM). Field emission scanning electron microscopy (FESEM) was used to analyze the surface morphology of the thin film. From the results obtained, it can be shown that the annealed sample had a rougher surface and better crystallinity as compared to as-deposited sample.
机译:已知钛酸锶锶(Baossro_5TiO_3)在微波频率下具有高介电常数和低损耗。这些独特的功能对于许多电子应用是有用的。本文侧重于RF磁控溅射系统沉积在蓝宝石底物上的BST薄膜的材料表征。然后将样品在900℃下退火2小时。使用几种方法来表征诸如X射线衍射(XRD)和原子力显微镜(AFM)的材料的结构性质。场发射扫描电子显微镜(FESEM)用于分析薄膜的表面形态。从得到的结果中,可以表明,与沉积的样品相比,退火样品具有更粗糙的表面和更好的结晶度。

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