Effect of Mg Dopant Percentage on the Photoluminescence Property of Nano-Structured ZnO Thin Films Deposited on Si Substrate

摘要

ZnO thin films of various Mg doping percentages have been prepared by sol gel spin coating method. For this experiment, zinc acetate dihydrate and magnesium acetate tetrahydrate were used as a starting material and dopant sources, while 2-methoxyethanol and monoethanolamine (MEA), were used as a solvent and stabilizer. To optimize the thin films quality, the percentage of magnesium doped in the solution was selected as the parameter. The thin films were deposited onto a silicon substrate. After depositing all layers, the thin films are annealed at 500°C, for 1 hour. The optical properties of the thin films were characterized by photoluminescence spectrometer (PL).