Conductometric Sensor Based on Nanostructured Titanium Oxide Thin Film Deposited on Polyimide Substrate with Dissimilar Metallic Electrodes

摘要

A conductometric sensor was fabricated on flexible polyimide substrate with using interdigital transducer (IDT) formed by periodic Au and Cr tracks and coated with a TiO{sub}2 nanostructured sensitive layer. Thin films of TiO{sub}2 were deposited using the radio frequency (RF) magnetron sputtering method. Atomic force microscope (AFM) and scanning electron microscope (SEM) techniques were employed for the characterization of thin films. The sensor was tested towards humidity changes at room temperature.