Titanium oxide thin film deposited on metallic Cr substrate by RF-magnetron sputtering

摘要

In order to develop a colored mirror with hydrophilicity, TiO_2 films are deposited on the Cr and amorphous-TiO_2 substrate. In TiO_2/Cr, a mixed phase comprising of anatase and rutile is formed. In TiO_2/amorphous-TiO_2/Cr, pure anatase phase is obtained. The amorphous-TiO_2 film as interlayer tends to induce micro-columnar-shaped anatase phase. The formation of anatase phase leads to an abrupt decrease of the contact angle by UV-irradiation. Hydrophilic to hydrophobic reconversion by electron-hole recombination is retarded, which seems to be due to pure anatase phase without rutile phase.