Structure and Morphology of Neodymium-doped Cerium Oxide Solid Solution Prepared by a Combined Simple Polymer Heating and D.C.-Magnetron Sputtering Method

摘要

Neodymium-doped Cerium Oxide (NDC) solid solution is attractive alternative material to replace yttria-stabillized zirconia (YSZ) used as an electrolyte for solid-oxide fuel cells (SOFCs). In this study Nd-CeO2 nanoparticles with Nd of 3, 6 and 9 at./at.-% were synthesized by simple polymer heating. The NDC thin films were deposited on silicon substrates by using target made from the nanoparticles. Deposition process was carried out by D.C.-magnetron sputtering at temperature as low as 375 °C. XRD pattern was used to confirm solid solubility and structural properties of the films. The results indicated that all samples are single phase solid solution with cubic fluorite structure. Their lattice parameters increase with increasing Nd content. It was also found that the mean grain size decrease with increasing Nd content. SEM analysis showed that NDC thin films have dense and uniform thickness. These results revealed that the nanoparticles and thin films of NDC solid solution are successfully prepared by a combined simple polymer heating and D.C.-Magnetron Sputtering method at low temperature.