The Electrical Performance Analysis of Piezoelectric Micromachine Ultrasound Transducer for Audio Directional Loudspeaker

摘要

This paper presents a novel piezoelectric micromachine ultrasound transducer (pMUT), consisted Pb(Zr,Ti)O3 (PZT) film on silicon membrane. The proposed micro-transducer is applied in an audio beam loudspeaker for mobile communication devices. At present, most of the portable products’ energy supply are provided by battery, so the power consumption of the pMUT has been attracted more attention. To obtain optimum design parameters and to predict the power consumption of the transducer before actual fabrication, finite element analysis (FEA) simulations utilizing CoventorWare were performed. The transducer model is analyzed using piezoelectric and electrical simulation. Combined with Butterworth Van Dyke (BVD) circuit and mathematical calculation, it is found that the maximum power consumption of one transducer is about to 0.4W. Under normal condition, the average power consumption of emitter in audio system is far less than the maximum power consumption.