A Smart Resonating Micro-Cantilever in MEMS Gas Sensor:Improved Design

摘要

A smart micro-cantilever in a creative gas sensor with high sensitivity is presented. The resonance frequency shifting ofthe cantilever is monitored to detect its mass change caused by adsorption of certain gas molecules. The cantilever has amore compact MEMS structure and the smart functions because of the sensor with a self-actuating and detecting (SAD)vibration system, which is integration of a vibration actuating system and a detecting system. The model of the smartbeam is analyzed by computer simulation. Design rules of the beam are obtained according to related discuss withfunction goal of extremely rare gas detection. After fabrication and test of the smart cantilever, an improved solution ofthe smart cantilever is introduced by comparison study of the computer simulation and experiment results of thefabricated beam.