Sub-10 nm-thick-carbon nanotube tip for AFM

摘要

Double-walled nanotube tip for AFM was fabricated using nano-manipulation in SEM, and then the rectangular grating sample was measured with the made tip. The sample was also measured with a commercial high aspect ratio tip and compared. With adaptive scan mode, we obtained reasonable and promising results. More improvement is expected by the further optimization of the tip control as well as tip fabrication. We plan TEM analysis and the mechanical test for the fabricated tip.