METHOD FOR ATTACHING CARBON NANOTUBES FOR THE NANONEEDLE TIP OF ATOMIC FORCE MICROSCOPE(AFM) AND THE NANONEEDLE TIP OF AFM IN WHICH CARBON NANOTUBES ARE ATTACHED USING THE SAME

摘要

PURPOSE: A method for attaching carbon nanotubes for the nanoneedle tip of atomic force microscope(AFM) is provided to increase productivity and reduce the unit cost by attaching carbon nanotubes on the nanoneedle tip of AFM without a nano-needle manipulator. ;CONSTITUTION: A nanoneedle tip of AFM is placed on the holder for holding the sample of scanning electron microscope(SEM) and the carbon nanotubes attached on the omni-probe are fixed to the tip(S120). The carbon nanotubes attached on the tip are arranged approximately vertical direction to the nanoneedle(S130). The carbon nanotubes attached on the omni-probe are accurately cut and removed by irradiating focused ion beam and electronic beam(S140). The carbon nanotube are lined up in parallel to the focused ion beam by irradiating the focused ion beam(S150).;COPYRIGHT KIPO 2011