QUANTIFICATION OF HAFNIUM IN HAFNIUM OXIDE FILM BY ISOTOPE DILUTION NEUTRON ACTIVATION ANALYSIS

机译：同位素稀释中子活化分析定量氧化铪膜中铪铪的定量

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Hafnium amounts in hafnium oxide films were quantified as area densities through ID-NAA. The results demonstrated that ID-NAA is applicable for the precise methodology for semiconductor-device manufacturers.

机译：氧化铪膜中的铪量被定量为通过ID-NAA的面积密度。结果表明ID-NAA适用于半导体器件制造商的精确方法。

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《International Conference on Frontiers of Characterization and Metrology for Nanoelectronics》|2014年||共3页
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Toshiko Takatsuka; Kouichi Hirata; Kenji Ito; Naoko Nonose; Tsutomu Miura;
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中图分类 TB973-53;
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Hafnium oxide film; neutron activation analysis; isotope dilution;

机译：氧化铪膜;中子激活分析;同位素稀释;

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1. Internal correction of hafnium oxide spectral interferences and mass bias in the determination of platinum in environmental samples using isotope dilution analysis [J] . Rodríguez-Castrillón J.?., Moldovan M., García Alonso J.I. Analytical and bioanalytical chemistry . 2009,第1期

机译：使用同位素稀释分析法测定环境样品中的铂时，对氧化ha光谱干扰和质量偏差的内部校正
2. Internal correction of hafnium oxide spectral interferences and mass bias in the determination of platinum in environmental samples using isotope dilution analysis [J] . José ángel Rodríguez-Castrillón, Mariella Moldovan, J. Ignacio García Alonso Analytical and Bioanalytical Chemistry . 2009,第1期

机译：使用同位素稀释分析法测定环境样品中的铂时，对氧化ha光谱干扰和质量偏差的内部校正
3. Analysis of multilayered, nitrogen-doped aluminum oxide and hafnium oxide dielectric films for wide-temperature capacitor applications [J] . DeCerbo J. N., Bray K. R., Merrett J. N. Thin Solid Films . 2015,第SEPa1期

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4. QUANTIFICATION OF HAFNIUM IN HAFNIUM OXIDE FILM BY ISOTOPE DILUTION NEUTRON ACTIVATION ANALYSIS [C] . Toshiko Takatsuka, Kouichi Hirata, Kenji Ito, International Conference on Frontiers of Characterization and Metrology for Nanoelectronics . 2014

机译：同位素稀释中子活化分析定量氧化铪膜中铪铪的定量
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6. Synthesis of hafnium nanoparticles and hafnium nanoparticle films by gas condensation and energetic deposition [O] . Irini Michelakaki, Nikos Boukos, Dimitrios A Dragatogiannis, 2018

机译：气体冷凝和高能沉积合成纳米颗粒和ha纳米颗粒薄膜
7. Compositional analysis of polycrystalline hafnium oxide thin films by heavy-ion elastic recoil detection analysis [O] . Mártil de la Plaza, Ignacio, González Díaz, Germán, San Andres Serrano, Enrique 2020

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8. Neutron Detection Utilizing Gadolinium Doped Hafnium Oxide Films; Master's thesis [R] . Blasy, B. D. 2008

机译：利用掺钆掺杂氧化铪薄膜的中子探测;硕士论文

QUANTIFICATION OF HAFNIUM IN HAFNIUM OXIDE FILM BY ISOTOPE DILUTION NEUTRON ACTIVATION ANALYSIS

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