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Maximization of Constant Velocity Scan Range of Electrothermally-Actuated Micromirror by Pulse Width Modulated Drive

机译：通过脉冲宽度调制驱动器最大限度地通过电热致动微镜的恒定速度扫描范围

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摘要

Actuation of thermal bimorph-based electrothermal micromirrors by pulse width modulated (PWM) voltage is reported. PWM actuation provides more flexibility over continuous voltage waveforms especially in the case of micromirror arrays.

机译：报道了通过脉冲宽度调制（PWM）电压通过脉冲宽度致动热双芯片电热微镜的致动。 PWM致动提供了在微镜阵列的情况下的连续电压波形上的更多灵活性。

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《IEEE/LEOS International Conference on Optical MEMS and Nanophotonics 》|2009年||共2页
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作者
Sagnik Pal; Huikai Xie;
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原文格式 PDF
正文语种
中图分类 TN29-53;
关键词
Electrothermal actuation; Bimorph; Micromirror; Pulse width modulation; PWM; MEMS;

机译：电热致动;Bimorph;微镜;脉冲宽度调制;pwm;mems;

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专利

1. Pre-Shaped Open Loop Drive of Electrothermal Micromirror by Continuous and Pulse Width Modulated Waveforms [J] . Pal S., Xie H. Quantum Electronics, IEEE Journal of . 2010 ,第9期

机译：连续和脉宽调制波形对电热微镜的预成形开环驱动
2. Resolution enhancement using pulse width modulation in digital micromirror device-based point-array scanning pattern exposure [J] . Kuo Hung-Fei, Huang Yi-Jun Optics and Lasers in Engineering . 2016 ,第APRa期

机译：基于数字微镜器件的点阵扫描图案曝光中使用脉冲宽度调制的分辨率增强
3. A curved multimorph based electrothermal micromirror with large scan range and low drive voltage [J] . Pal S., Xie H. Sensors and Actuators, A. Physical . 2011 ,第1a2期

机译：具有大扫描范围和低驱动电压的基于弯曲多晶型的电热微镜
4. Maximization of Constant Velocity Scan Range of Electrothermally-Actuated Micromirror by Pulse Width Modulated Drive [C] . Sagnik Pal, Huikai Xie IEEE/LEOS International Conference on Optical MEMS and Nanophotonics . 2009

机译：通过脉冲宽度调制驱动器最大限度地通过电热致动微镜的恒定速度扫描范围
5. An Investigation into Pulse-Width Modulated AC Electric Drives with Open-End Winding Machines. [D] . Somani, Apurva. 2013

机译：带有开放式绕组机的脉宽调制交流电驱动器的研究。
6. Spectroscopic Imaging with Improved Gradient Modulated Constant Adiabadicity Pulses on High-Field Clinical Scanners [O] . Ovidiu C. Andronesi, Saadallah Ramadan, Eva-Maria Ratai, -1

机译：具有改进的梯度调制恒定的绝热性脉冲在高场临床扫描仪上的光谱成像
7. Spectroscopic imaging with improved gradient modulated constant adiabaticity pulses on high-field clinical scanners [O] . Andronesi, Ovidiu C., Ramadan, Saadallah, Ratai, Eva-Maria, 2010

机译：在高场临床扫描仪上使用改进的梯度调制恒定绝热脉冲进行光谱成像
8. Solid state pulse generator with constant output width, for variable input width, in nanosecond range Patent [R] . Garrahan, N. M. 1968

机译：固态脉冲发生器，输出宽度恒定，输入宽度可变，纳秒范围

Maximization of Constant Velocity Scan Range of Electrothermally-Actuated Micromirror by Pulse Width Modulated Drive

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