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ASSESSMENT OF 20 MICRON DIAMETER WIRES FOR WIRE BOND INTERCONNECT TECHNOLOGY

机译:用于电线键合互连技术20微米直径线的评估

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In the domain of wire bonding technology, the size and pitch of bond pads and ball bonds are shrinking to accommodate the demand for higher I/Os and increased functionality per chip area. This trend serves as a catalyst for bonding wire manufacturers to continuously develop lower diameter bonding wires. One mil (25 μm) diameter bonding wire, used widely in this interconnection technique, is now being replaced by 0.8 mil (20 μm) diameter bonding wire. In keeping with the need for higher operating speeds and higher temperatures for today's ICs, the reliability of ball bonds formed by small diameter wires is of concern and requires investigation. This study explores the effects of 0.8 mil (20 μm) diameter bonding wire on the wire bond ball joint reliability and compares these effects with 1.0 mil (25 μm) diameter bonding wire. The reliability of the ball bonds was assessed using mechanical tests (wire pull and ball shear) for units subjected to stress tests such as the unbiased highly accelerated stress test and high temperature storage tests. The results of this investigation reveal that both the wire diameters are able to sustain their integrity after moisture testing. But, the bond strength degrades after high temperature tests due to the Kirkendall voiding mechanism occurring between gold wire and the aluminum bond pad.
机译:在引线键合技术领域中,键合焊盘和球杆的尺寸和间距正在缩小以适应对较高I / O的需求和每个芯片区域的功能增加。该趋势用作粘合线制造商的催化剂,以连续地开发低直径的键合线。在该互连技术中广泛使用的一个密耳(25μm)直径的粘合线,现在替换为0.8密耳(20μm)直径的粘合线。在保持对当今IC的更高的操作速度和更高温度的情况下,由小直径线形成的球杆的可靠性是关注的并且需要进行调查。本研究探讨了0.8密耳(20μm)直径键合线对引线键合球接头可靠性的影响,并将这些效果与1.0密耳(25μm)直径的粘合线进行比较。使用机械测试(线拉和滚珠剪切)评估球键的可靠性,用于经受应力测试的单元,例如非偏析的高度加速应力测试和高温储存测试。本研究结果表明,金属丝直径都能够在水分测试后维持其完整性。但是,由于金线和铝合金焊盘之间发生的KirkendAll空隙机构,粘合强度在高温测试之后降低。

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