A THREE LASER INTERFEROMETERS AND ONE AUTOCOLLIMATOR SYSTEM FOR MEASURING THE YAW AND STRAIGHTNESS ERRORS OF A XY STAGE ON HIGH PRECISION CMM

摘要

To develop a high precision micro coordinate measuring machine (Micro-CMM), it is important to evaluate motion accuracy of each stage on the Micro-CMM. A three laser interferometers and one autocollimator system has been designed and established. In the system, the autocollimator measures the yaw error of the stage, and three laser interferometers simultaneously measure the profile of a standard mirror which is fixed on the top of a X-Y stage. The straightness error is reconstructed by the application of simultaneous equation and least-squares methods. With the different intervals of laser interferometers, the results of the standard deviation of multi-probe method are being discussed.