XY STAGE IN WHICH THE LASER INTERFEROMETER IS MOUNTED, CAPABLE OF ACCURATELY MEASURING THE DISPLACEMENT OF A LASER BEAM

摘要

PURPOSE: An XY stage in which the laser interferometer is mounted is provided to remove the unstableness of a laser beam which is caused by the airflow and the change of pressure and humidity.;CONSTITUTION: An XY stage comprises the first and second laser interferometers. The first laser interferometers measure an X-axis displacement by including the first laser beam generator(10), the first splitter(20) for passing and reflecting a laser beam, the first reflector(111), the first detector(40), the first guide pipe(50), and the first vacuum pump(60). The first guide pipe maintains the surroundings of the laser beam under the vacuum condition. The first vacuum pump maintains the inside of the first guide pipe under the vacuum condition. The second laser interferometer measures an Y-axis displacement.;COPYRIGHT KIPO 2010