Preparation and Property of Textured and Epitaxial PZT Films on Different Substrates

摘要

Textured and epitaxial Pb(ZrxTi1-x)O3 (PZT) films with Zr/Ti ratio of 53/47 were deposited on different substrates by sol-gel method.It was found that PZT films deposited on Pt(111)/Ti/SiO2/Si(100)substrates using an oxide seeding layer (lead oxide or titanium dioxide) resulted in highly textured orientations,while epitaxial PZT films were obtained on differently-oriented Nb-doped SrTiO3 (Nb:STO)single-crystal wafers.The difference of orientation and phase structure for textured and epitaxial PZT films were discussed,and the relationships for ferroelectric and piezoeletric properties with preferential orientations were evaluated.Higher remanent polarization and piezoelectric constant were obtained in epitaxial PZT films on Nb:STO than in textured PZT films on platinized silicon.The intrinsic and extrinsic contributions to high piezoelectric response of epitaxial PZT films were also discussed.