TIME DOMAIN MEASUREMENT OF VOLTAGE RISE TIME AND CURRENT RISE TIME DUE TO LOW VOLTAGE ESD USING 12GHz EXPERIMENTAL SYSTEM

摘要

Voltage rise time and current rise time due to small gap discharge as the low voltage ESD was investigated in time domain. The measurement system was improved on the band width from 6GHz to 12GHz using the coaxial electrode system. Also, the sensing system was changed from the coupled transmission lines to an E-field sensor and a H-field sensor. The insertion loss of the experimental system was within about -3dB in frequency range below 12GHz. As a consequence of the experiment using the system, voltage and current rise time of transition duration were shown 32 ps or less. The rise times were changed in configuration of electrodes, source polarity and discharging voltage. Besides, breakdown field was examined to corroborate the very fast transition durations of about 32ps. The breakdown field was very high of about 8×10{sup}7 V/m in low voltage discharging of below 330V.