Preparation of Ferroelectric K_(0.5)Na_(0.5)NbO_3 Films by Sol-Gel Processing

摘要

Orthorhombic perovskite-type K_(0.5)Na_(0.5)NbO_3 (KNN) films on Pt/Ti/SiO_2/Si substrates were prepared by sol-gel processing. The morphology of the films was characterized using SEM and AFM. The KNN films with a total thickness of about 0.5 micron had relatively dense and uniform microstructure. The ferroelectricity of the KNN films was confirmed by polarization-electric field (P-E) hysteresis loop.