Two Axial Shearing Force Measurement Device with a Built-in Integrated Micro Displacement Sensor

摘要

We propose a promising biaxial shearing force measurement device with an integrated micro displacement sensor (chip size of 3 mm by 3 mm and 0.7 mm in thickness) housed in an external trapezoidal metallic frame. The displacement sensor is used to measure the tilt angles of a mirror on the ceiling of the frame caused by the shearing force applied to the upper surface of the frame. A linear signal response to applied biaxial shearing force was obtained. The range and sensitivity of the sensor depend on the material and shape of the frame and thereby allow the sensor great versatility with numerous possible applications.