Post-Bonding and Fabrication of Low Temperature Co-Fired Ceramic

摘要

The development of an Ion Mobility Spectrometer (IMS) drift tube fabricated in low temperature co-fired ceramics has driven the need to develop a process for bonding post fired LTCC pieces. As originally designed, the drift tube for the (IMS) device required that more than 200 layers of LTCC to be fired jointly and electrical connections to be made on each layer. To improve yield, a process to bond and electrically connect fired pieces of LTCC was developed. A glass encapsulant paste was used for the bonding and the electrical connections were made with conductive paste. This glass encapsulate process could also be used to embed other elements inside of cavities, bonding of very small systems, and to improve the development of other devices.