ADVANCED FIB APPLICATIONS IN MATERIALS RESEARCH AT CanmetMATERIALS

摘要

In the past decades, focused ion beam (FIB) has evolved into a powerful microscope that provides capabilities that no other microscopes can offer. The combination of high-resolution imaging and stress-free ion beam cross sectioning provides valuable microstructure information both at the specimen surface and beneath. FIB techniques are also the preferred method to prepare site-specific transmission electron microscope (TEM) specimens. CanmetMATERIALS owns a world-class microscopy facility, where advanced microscopy work provides strong supports to research programs that cover a wide range of subject areas. This paper is aimed to provide a few practical examples of FIB applications in microstructure characterizations that include cross-sectioning and imaging, serial sectioning, and advanced TEM specimen preparation in materials research at CanmetMATERIALS.